Class 117 | SINGLE-CRYSTAL, ORIENTED-CRYSTAL, AND EPITAXY GROWTH PROCESSES; NON-COATING APPARATUS THEREFOR |
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1 | PROCESSES JOINING INDEPENDENT CRYSTALS |
2 | PROCESSES OF GROWTH WITH A SUBSEQUENT STEP ACTING ON THE CRYSTAL TO ADJUST THE IMPURITY AMOUNT (E.G., DIFFUSING, DOPING, GETTERING, IMPLANTING) |
3 | PROCESSES OF GROWTH WITH A SUBSEQUENT STEP OF HEAT TREATING OR DELIBERATE CONTROLLED COOLING OF THE SINGLE-CRYSTAL |
4 | PROCESSES OF GROWTH FROM SOLID OR GEL STATE (E.G., SOLID PHASE RECRYSTALLIZATION) |
11 | PROCESSES OF GROWTH FROM LIQUID OR SUPERCRITICAL STATE |
12 | Crucibleless process having movement of discrete droplets or solid particles to thin-film precursor (e.g., Verneuil method) |
13 | Having pulling during growth (e.g., Czochralski method, zone drawing) |
14 | With a step of measuring, testing, or sensing (e.g., using TV, photo, or X-ray detector or weight changes) |
17 | With contact with an immiscible liquid (e.g., LEC) |
19 | Forming an intended mixture (excluding mixed crystal) (e.g., doped) |
20 | Comprising a silicon crystal with oxygen containing impurity |
21 | Comprising a semiconductor with a charge carrier impurity |
23 | Shape defined by a solid member other than seed or product (e.g., edge-defined film-fed growth, Stepanov method) |
24 | Embedded in product (e.g., string-stabilized web) |
25 | Defines a product with a hollow structure (e.g., tube) |
26 | Defines a flat product |
28 | Including non-coincident axes of rotation (e.g., relative eccentric) |
29 | Passing non-induced electric current through a crystal-liquid interface (e.g., Peltier) |
30 | With liquid flow control or manipulation during growth (e.g., mixing, replenishing, magnetic levitation, stabilization, convection control, baffle) |
31 | Including a sectioned crucible (e.g., double crucible, baffle) |
32 | Using a magnetic field |
33 | Replenishing of precursor during growth (e.g., continuous method, zone pulling) |
35 | With a significant technique for (a) preliminary preparation or growth starting or (b) product handling or growth ending (e.g., arrangement of or crystallography of seed) |
36 | Precursor intentionally contains an excess component or a non-product appearing component (e.g., solvent, flux, crystal lattice modifier) |
37 | Having moving solid-liquid-solid region |
38 | Including a step of measuring, testing, or sensing |
41 | Precursor composition intentionally different from product (e.g., excess component, non-product forming component, dopant, non-stoichiometric precursor, travelling solvent, flux) |
43 | Distinctly layered product (e.g., twin, SOI, epitaxial crystallization) |
44 | Adjacent single-crystal product regions separately formed (e.g., multiple non-coextensive passes of a scanning laser) |
45 | Non-planar crystal grown (e.g., ELO) |
46 | Movement includes a horizontal component |
47 | Flat, free-standing (i.e., substrate-free) product (e.g., ribbon, film, sheet) |
48 | Solid heating means contacting the liquid (e.g., immersed) |
49 | Liquid zone contacts only precursor and product solids (e.g., crucibleless, liquid encapsulant, float zone) |
53 | Forming a single-crystal region by liquefying a region of a single-crystal and adjusting the composition of the liquid (e.g., alloying, regrowth) |
54 | Liquid phase epitaxial growth (LPE) |
55 | With a step of measuring, testing, or sensing |
56 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
58 | With pretreatment of epitaxy substrate (e.g., autodoping control, cleaning, polishing, leveling, masking) |
59 | Including a tipping system (e.g., rotation, pivoting) |
60 | Including a vertical dipping system |
61 | Including a sliding boat system |
62 | Electric current controlled or induced growth |
63 | Characterized by specified crystallography of the substrate |
64 | Precursor composition intentionally contains an excess component or a non-product appearing component (e.g., solvent, flux) |
68 | Having growth from a solution comprising a solvent which is liquid at or below 20 degrees Celsius (e.g., aqueous solution) |
69 | With a step of measuring, testing, or sensing |
70 | Growth accompanied by material removal (other than the product) from solution (e.g., solvent evaporation, osmosis) |
71 | At pressure above 1 atmosphere (e.g., hydrothermal processes) |
73 | Havin growth from molten state (e.g., solution melt) |
74 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
75 | Forming a platelet shape or a small diameter, elongate, generally cylindrical shape (e.g., whisker, fiber, needle, filament) (e.g., VLS method) |
76 | Using a scavenger agent (e.g., remove, add, deplete, or redistribute impurity or dopant) |
77 | Gas or vapor state precursor or overpressure |
78 | Precursor composition intentionally different from product (e.g., excess component, non-product forming component, dopant, non-stoichiometric precursor, solvent, flux) |
79 | Unusable portion contains a metal atom (e.g., diamond or CBN growth in metal solvent) |
80 | Unusable portion contains an oxygen atom (e.g., oxide flux) |
81 | Growth confined by a solid member other than seed or product (e.g., Bridgman-Stockbarger method) |
84 | FORMING FROM VAPOR OR GASEOUS STATE (E.G., VPE, SUBLIMATION) |
85 | With a step of measuring, testing, or sensing |
87 | Forming a platelet shape or a small diameter, elongate, generally cylindrical shape (e.g., whisker, fiber, needle, filament) |
88 | With decomposition of a precursor (except impurity or dopant precursor) composed of diverse atoms (e.g., CVD) |
89 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
90 | With pretreatment of substrate (e.g., coacting ablating) |
91 | With a chemical reaction (except ionization) in a disparate zone to form a precursor |
92 | Using an energy beam or field, a particle beam or field, or a plasma (e.g., ionization, PECVD, CBE, MOMBE, RF induction, laser) |
93 | With significant flow manipulation or condition, other than merely specifying the components or their sequence or both |
94 | With pretreatment or preparation of a base (e.g., annealing) |
98 | With a movement of substrate or vapor or gas supply means during growth (e.g., substrate rotation) |
99 | With a chemical reaction (except ionization) in a disparate zone to form a precursor (e.g., transport processes) |
101 | Characterized by specified crystallography or arrangement of substrate (e.g., wafer cassette, Miller index) |
102 | With significant flow manipulation or condition, other than merely specifying the components or their sequence or both |
103 | Using an energy beam or field, a particle beam or field, or a plasma (e.g., ionization, PECVD, CBE, MOMBE, RF induction, laser) |
104 | Using an organic precursor (e.g., propane, metal-organic, MOCVD, MOVPE) |
105 | Including change in a growth-influencing parameter (e.g., composition, temperature, concentration, flow rate) during growth (e.g., multilayer or junction or superlattice growing) |
106 | With pretreatment or preparation of a base (e.g., annealing) |
107 | With movement of substrate or vapor or gas supply means during growth |
108 | Using an energy beam or field, a particle beam or field, or a plasma (e.g., MBE) |
109 | Fully-sealed or vacuum-maintained chamber (e.g., ampoule) |
200 | APPARATUS |
201 | With means for measuring, testing, or sensing |
204 | With means for treating single-crystal (e.g., heat treating) |
205 | For forming a platelet shape or a small diameter, elongate, generally cylindrical shape (e.g., whisker, fiber, needle, filament) |
206 | For crystallization from liquid or supercritical state |
207 | Crucibleless apparatus having means providing movement of discrete droplets or solid particles to thin-film precursor (e.g., Verneuil method) |
208 | Seed pulling |
209 | Including solid member shaping means other than seed or product (e.g., EDFG die) |
210 | Means for forming a hollow structure (e.g., tube, polygon) |
211 | Including means forming a flat shape (e.g., ribbon) |
213 | Including a sectioned crucible (e.g., double crucible, baffle) |
214 | Including details of precursor replenishment |
215 | Including sealing means details |
216 | Including a fully-sealed or vacuum-maintained crystallization chamber (e.g., ampoule) |
217 | Including heating or cooling details (e.g., shield configuration) |
218 | Including details of means providing product movement (e.g., shaft guides, servo means) |
219 | Having means for producing a moving solid-liquid-solid zone |
220 | Includin a solid member other than seed or product contacting the liquid (e.g., crucible, immersed heating element) |
221 | Havind details of a stabilizing feature |
222 | Including heating or cooling details |
223 | Shape defined by a solid member other than seed or product (e.g., Bridgman-Stockbarger) |
224 | Including pressurized crystallization means (e.g., hydrothermal) |
CROSS-REFERENCE ART COLLECTIONS | ||
900 | APPARATUS CHARACTERIZED BY COMPOSITION OR TREATMENT THEREOF (E.G., SURFACE FINISH, SURFACE COATING) |
901 | LEVITATION, REDUCED GRAVITY, MICROGRAVITY, SPACE |
902 | SPECIFIED ORIENTATION, SHAPE, CRYSTALLOGRAPHY, OR SIZE OF SEED OR SUBSTRATE |
903 | DENDRITE OR WEB OR CAGE TECHNIQUE |
904 | LASER BEAM |
905 | ELECTRON BEAM |
906 | SPECIAL ATMOSPHERE OTHER THAN VACUUM OR INERT |
910 | DOWNWARD PULLING |
911 | SEED OR ROD HOLDERS |
912 | REPLENISHING LIQUID PRECURSOR, OTHER THAN A MOVING ZONE |
913 | GRAPHOEPITAXY OR SURFACE MODIFICATION TO ENHANCE EPITAXY |
914 | CRYSTALLIZATION ON A CONTINUOUS MOVING SUBSTRATE OR COOLING SURFACE (E.G., WHEEL, CYLINDER, BELT) |
915 | SEPARATING FROM SUBSTRATE |
916 | OXYGEN TESTING |
917 | MAGNETIC |
918 | SINGLE-CRYSTAL WAVEGUIDE |
919 | Organic |
E-subclasses in USPC Class 117/920-958 were created as duplicates of EPO groups in subclass C30B. With the implementation of CPC, these E-subclasses should no longer be used. Instead, use CPC subclass C30B. | ||
920 | SINGLE-CRYSTALS HAVING A HOLLOW (E.G., TUBE, CONCAVO-CONVEX) {C30B 29/66} |
921 | SMALL DIAMETER, ELONGATE, GENERALLY CYLINDRICAL SINGLE-CRYSTAL (E.G., WHISKERS, NEEDLES, FILAMENTS, FIBERS, WIRES) {C30B 29/62} |
922 | FREE-STANDING, FLAT SINGLE-CRYSTAL (E.G., PLATELET, PLATE, STRIP, DISK, TAPE, SHEET, RIBBON) {C30B 29/64} |
923 | SINGLE-CRYSTAL OF COMPLEX GEOMETRY (E.G., PATTERNED, ELO) {C30B 29/66} |
924 | HOMOGENEOUS COMPOSITION PRODUCT WITH ENLARGED CRYSTALS OR ORIENTED-CRYSTALS (E.G., COLUMNAR) |
925 | ORGANIC COMPOUND CONTAINING SINGLE-CRYSTAL {C30B 29/54} |
926 | Tartrate containing (e.g., Rochelle salt) {C30B 29/56} |
927 | Macromolecular compound containing (i.e., more than about 100 atoms) {C30B 29/58} |
928 | SINGLE-CRYSTAL OF PURE OR INTENTIONALLY DOPED ELEMENT {C30B 29/02} |
929 | Carbon (e.g., diamond) {C30B 29/04} |
930 | Silicon from solid or gel state {C30B 29/06} |
931 | Silicon from liquid or supercritical state {C30B 29/06} |
932 | By pulling {C30B 29/06} |
933 | By moving zone (not Verneuil) {C30B 29/06} |
934 | By liquid phase epitaxy {C30B 29/06} |
935 | Silicon from vapor or gaseous state {C30B 29/06} |
936 | Germanium {C30B 29/08} |
937 | INORGANIC CONTAINING SINGLE-CRYSTAL (E.G., COMPOUND, MIXTURE, COMPOSITE) {C30B 29/10} |
938 | Gold, silver, or platinum containing {C30B 29/52} |
939 | Free metal or intermetallic compound or silicon-metal compound based, except arsenic (e.g., alloys, SiGe, InSb) {C30B 29/40, 29/52} |
940 | Halide containing (e.g., fluorphlogopite, fluor-mica) {C30B 29/12} |
941 | Phosphorus-oxygen bond containing (e.g., phosphate (PO4)) {C30B 29/14} |
942 | Silicon-oxygen bond containing (e.g., emerald, beryl, garnet, mica) {C30B 29/16} |
944 | Oxygen compound containing (e.g., yttria stabilized zirconia) {C30B 29/16} |
948 | Niobate, vanadate, or tantalate containing {C30B 29/30} |
949 | Titanate, germanate, molybdate, or tungstate containing {C30B 29/32} |
950 | Aluminum containing (e.g., AL2O3, ruby, corundum, sapphire, chrysoberyl) {C30B 29/20} |
951 | Carbide containing (e.g., SiC) {C30B 29/36} |
952 | Nitride containing (e.g., GaN, cBN) {C30B 29/38} |
953 | {B,Al,Ga,In,Tl}{P,As,Sb,Bi} compound containing, except intermetallics thereof (i.e., except {Al,Ga,In,Tl}{Sb,Bi}) {C30B 29/40} |
954 | Gallium arsenide containing (e.g., GaAlAs, GaAs) {C30B 29/42} |
955 | Gallium phosphide containing {C30B 29/44} |
956 | {Zn,Cd,Hg}{S,Se,Te} compound containing {C30B 29/46} |
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